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A comprehensive calibration of integrated magnetron sputtering and plasma enhanced chemical vapor deposition for rare-earth doped thin films.
J Mater Res. 2024;39(1):150-164. doi: 10.1557/s43578-023-01207-2. Epub 2023 Nov 7.
J Mater Res. 2024.
PMID: 38223565
Free PMC article.
A new integrated deposition system taking advantage of magnetron sputtering and electron cyclotron-plasma enhanced chemical vapour deposition (IMS ECR-PECVD) is presented that mitigates the drawbacks of each fabrication system. ...The deposition parameters to fabricate cry …
A new integrated deposition system taking advantage of magnetron sputtering and electron cyclotron-plasma enhanced chemical vapour de …
Multimode fiber surface plasmon resonance sensor based on a down-up taper.
Jin B, Wang DN.
Jin B, et al.
Opt Lett. 2022 Oct 15;47(20):5329-5332. doi: 10.1364/OL.474801.
Opt Lett. 2022.
PMID: 36240354
The device is fabricated by splicing two multimode fibers in a heating and pushing process to form an up taper, followed by heating and pulling the fiber adjacent to the up-taper area to form a down taper, and then using a magnetron sputtering technique to deposit a …
The device is fabricated by splicing two multimode fibers in a heating and pushing process to form an up taper, followed by heating a …
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